Annotation
Optical coefficients of copper and gold films with thicknesses 0.5 to 10 nm are studied at the frequency of 10GHz. The vector network analyzer R&S ZVA 24 and waveguide resonator are used in measuring circuit. It is shown that the experimental results for transmission coefficient of the copper films correspond to the calculated values when equivalent thickness reduced on the 6 nm is introduced. The measured value of conductivity of the copper film is almost an order of magnitude less than the bulk conductivity of copper.
PACS:
73.61.-r Electrical properties of specific thin films
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
S.M. Pronin$^1$, V.A. Vdovin$^2$, V.G. Andreev$^3$
$^1$Department of photonics and microwave physics, Faculty of Physics, Lomonosov Moscow State University. Moscow 119991, Russia
$^2$V.A. Kotelnikov Institute of Radio Engineering and Electronics RAS, Mokhovaya ul. 11, str. 7, Moscow, 125009 Russia
$^3$Department of acoustics, Faculty of Physics, Lomonosov Moscow State University
$^1$Department of photonics and microwave physics, Faculty of Physics, Lomonosov Moscow State University. Moscow 119991, Russia
$^2$V.A. Kotelnikov Institute of Radio Engineering and Electronics RAS, Mokhovaya ul. 11, str. 7, Moscow, 125009 Russia
$^3$Department of acoustics, Faculty of Physics, Lomonosov Moscow State University