The influence of the structure features of the vacuum diamond-like coatings doped with group via metals on their properties

The results from a comprehensive investigation of the structure, phase and chemical composition,and tribological properties of doped with Via group metals (Cr, Mo and W) coatings of hydrogenised amorphous carbon are presented. The chromium doped coatings are deposited via reactive magnetron sputtering in an reactive gas mixture at various volume concentrations of nitrogen and acetylene. The tungsten doped coating is produced via non-reactive magnetron sputtering. The molybdenum doped coating is deposited via plasma-assisted chemical vapour deposition It is found that the type of doped metal has a great influence not only on chemical or phase composition of diamond-like coatings, but also on such of their properties as coefficient of friction and high contact pressure performance. The chromium doped coatings containing large amount of nytrogen atoms have most optimal combination of tribological properties.