The modification method of the microwave acoustic resonator spectroscopy of thin layers and films for measurements over a wide frequency range

The spectrum of the composite acoustic resonator (HBAR) is a multimode, and may contain several thousand resonance peaks. We have developed a set of programs that allows recording the spectrum scans with arbitrary frequency step within the whole frequency range of the network analyzer. Due to the high degree of automation of the processing of scans we obtain data on the parameters (frequency and width) of each resonance peak. Proposed method increases the accuracy of the previously known method of measuring the velocity of an acoustic wave (AW) of the material by comparing the spectra HBAR before and after developing the test layer. For the layers with the thickness of a few wavelengths the new method allows to obtain information about the velocity from only one AW spectrum.