Annotation
The main characteristic of a MEMS switch is the ratio of capacitances in the open and closed states. In conventional switches, this ratio usually does not exceed ten and can be increased several times by using a floating potential electrode. The dependence of the capacitive characteristics, isolation and insertion loss of a switch with the «floating» electrode on the substrate material is investigated.
Received: 2024 June 3
Approved: 2024 August 16
PACS:
85.85.+j Micro- and nano-electromechanical systems
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
M. O. Morozov$^{1,2}$, I. V. Uvarov$^2$
$^1$\
$^2$VALIEV INSTITUTE OF PHYSICS AND TECHNOLOGY of RUSSIAN ACADEMY OF SCIENCES, YAROSLAVL BRANCH
$^1$\
$^2$VALIEV INSTITUTE OF PHYSICS AND TECHNOLOGY of RUSSIAN ACADEMY OF SCIENCES, YAROSLAVL BRANCH
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