On the assessment of target heating by an electron probe. Results of mathematical modeling

Mathematical modeling methods are used to estimate the heating of solid targets irradiated by a kilovolt electron beam. When carrying out the calculations, a mathematical model was used that takes into account the separate contribution to the energy loss of electrons absorbed in the target and backscattered. The calculation results showed that for heavy targets the dependence of target overheating on the beam electron energy is non-monotonic: in the region of about 3-4 keV a local minimum appeared, due to the significant contribution of backscattered electrons to the energy loss. A qualitative assessment of heat transfer by radiation showed that for a low-energy electron probe, when setting boundary value problems, it is justified to consider the body flux through the outer surface of the target to be zero.