In this work, the influence of incident particles energy transferred to the target atoms on the destruction of a graphene coating deposited on copper foil was studied. The graphene coating was irradiated using He$^+$ and Ar$^+$ ions at an energy of 100 keV at room temperature of the sample. The study of the target structure before and after irradiation was carried out by the method of Raman scattering of light. The simulation of energy loss by incident ions during interaction with target atoms was carried out by the Monte Carlo method in the approximation of binary collisions. It was shown that the main mechanism of destruction of the graphene coating during irradiation is the elastic interaction of the incident particles with the target atoms.
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$^3$National University of Science and Technology "MISIS"