The results of a comprehensive study of the effect of phase composition and microstructure features on the mechanical and tribological properties of titanium coatings obtained by reactive magnetron sputtering in the atmosphere of acetylene and nitrogen are presented. It was established that all the coatings contain amorphous carbon, and different types of stoichiometric and non-stoichiometric carbide, nitride and oxide phases of titanium. The resulting coatings have a low coefficient of friction and remain operational at contact pressures up to 450 MPa during 6000 cycles of friction-fatigue tests.
62.20.Qp Friction, tribology, and hardness
68.60.-p Physical properties of thin films, nonelectronic
78.30.-j Infrared and Raman spectra
$^1$Department of Solid State Physics, Faculty of Physics, M.V.Lomonosov Moscow State University.\
$^2$Blagonravov Mechanical Engineering Research Institute of RAS
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