Development of nanobiosensors based on acoustoelectronic technology

Using methods of acoustoelectronics and integration of nanobiosensors with acoustic delay lines within planar technologies give the chance of development of the acousto-bionanoelectronic sensors with high sensitivity and selectivity. In the paper the acoustoelectric chip sensor based on a lithium niobate plate with thickness 0.35 mm with interdigiral transducer on the surface is developed for excitement of the corresponding acoustic wave. This chip-sensor is inserted into the chip holder with the standard socket of knife type. For production of planar nanostructure of a nanoelectronic transducer the standard photolithography technology, various photoresist, jet ionic etching and a magnetron sputtering was used. The area of 80х80 microns in the center of the chip served for formation of electronic nanostructure which is a prototype of a nanoelectronic transducer. In the obtained nanostructures nanogaps for an immobilization of molecules of proteins-enzymes and creation of selective molecular biosensors can be created.