The sensitivity of dispersion characteristics of acoustic waves in the layered structure "Me/ZnO/Me/diamond" from the thickness of metallic layers

S. I. Burkov$^1$, O. P. Zolotova$^2$, P. P. Turchin$^1$, I. M. Rychkov$^1$

Memoirs of the Faculty of Physics 2017. N 5.

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In the present work, a study of influence of mass loading of two metal layers (upper and lower electrode) on the changes in the phase velocity of the dispersive modes of elastic wave in a piezoelectric layered structure “Me/ZnO/Me/diamond” has been fulfilled. Dependences of this quantity from the h×f product (frequency×thickness of the piezoelectric) and the d/h ratio (metal thickness/piezoelectric thickness) are analyzed. The materials of the metallic layers are aluminum (Al), molybdenum (Mo), platinum (Pt).

Received: 2017 July 3

Approved: 2017 October 17

PACS:

43.35.+d Ultrasonics, quantum acoustics, and physical effects of sound
68.60.Bs Mechanical and acoustical properties
68.65.Ac Multilayers

Authors

S. I. Burkov$^1$, O. P. Zolotova$^2$, P. P. Turchin$^1$, I. M. Rychkov$^1$
$^1$Institute of Engineering Physics and Radio Electronics, Siberian State University\
$^2$Institute of Space Research and High Technologies, Reshetnev Siberian State University of Science and Technology

Issue 5, 2017

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