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Nearfield microwave microscope for measuring the conductivity of thin metallic films

V.I. Frolov$^1$, V.A. Vdovin$^2$, V.G. Andreev$^3$

Memoirs of the Faculty of Physics 2016. N 5.

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Annotation

An experimental prototype of the near-field microscope based on the coaxial microwave resonator and a vector network analyzer R&S ZVA 24 is described. The results of test measurements of the shift of the resonance frequency and the quality factor of the resonance curve with the use of bulk conductors made of metals of different conductivity are presented. It is shown qualitatively that the resonant frequency and the quality factor decreases as the probe approaches the surface of the conductor. Q–value is minimal when using a conductor with the lowest conductivity.

PACS:
73.61.-r Electrical properties of specific thin films
Rissian citation:
В.И. Фролов,  В.А. Вдовин, В.Г. Андреев.
Ближнеполевой СВЧ микроскоп для измерения проводимости тонких металлических пленок.
Учен. зап. физ. фак-та Моск. ун-та. 2016. № 5. 165412.
Authors
V.I. Frolov$^1$, V.A. Vdovin$^2$, V.G. Andreev$^3$
$^1$Department of photonics and microwave physics, Faculty of Physics, Lomonosov Moscow State University. Moscow 119991, Russia
$^2$V.A. Kotelnikov Institute of Radio Engineering and Electronics RAS, Mokhovaya ul. 11, str. 7, Moscow, 125009 Russia
$^3$Department of acoustics, Faculty of Physics, Lomonosov Moscow State University
Issue 5, 2016

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