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Si/SiO2/III-nitride nanotemplаtes

Osinsky V.I., Lyahova N.N. Hlotov1 V.I. Suhovyy N.O. Lytvyn O.S. Deminskyi P.V.

Memoirs of the Faculty of Physics 2014. N 2.

  • Article
Annotation

The nanotemplet technology of «SiO2 - initiation layer Al2O3 - III-nitride» on silicon substrates for non-polar III-nitride heterostructures by gas-phase deposition using organometallic compounds in the formation of GaN/InGaN quantum wells, provides the formation of arrays of GaN-InGaN nanodots and nanorings on GaN nanorods. This ensures low dislocation density, ~ 3 × 106 cm-2, the increase in the photoluminescence intensity order of magnitude compared with flat patterns and the possibility of obtaining a higher concentration of indium in the solid solution InGaN

Received: 2013 September 24
Approved: 2014 June 17
PACS:
78.67.De Quantum wells
61.46.Df Structure of nanocrystals and nanoparticles
Authors
Osinsky V.I., Lyahova N.N. Hlotov1 V.I. Suhovyy N.O. Lytvyn O.S. Deminskyi P.V.
Institute of Microdevices NAS of Ukraine. Severo-Syretska str., No 3, 04136, Kyiv,
Issue 2, 2014

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