MEMS switches have great potential for use in advanced radar and communication systems, but their practical implementation is limited by several factors. The capacitance ratio in the closed and open state is usually several units, which does not meet the desired specifications. By adding an intermediate electrode on top of the dielectric layer, the capacitance ratio can be significantly increased. In this study, the capacitive and radio-frequency characteristics of a switch with an intermediate electrode are calculated.
$^1$P.G. Demidov Yaroslavl State University\
$^2$NRC «Kurchatov Institute» – Valiev IPT
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