Annotation
In the present work, a study of influence of mass loading of two metal layers (upper and lower electrode) on the changes in the phase velocity of the dispersive modes of elastic wave in a piezoelectric layered structure “Me/ZnO/Me/diamond” has been fulfilled. Dependences of this quantity from the h×f product (frequency×thickness of the piezoelectric) and the d/h ratio (metal thickness/piezoelectric thickness) are analyzed. The materials of the metallic layers are aluminum (Al), molybdenum (Mo), platinum (Pt).
Received: 2017 July 3
Approved: 2017 October 17
PACS:
43.35.+d Ultrasonics, quantum acoustics, and physical effects of sound
68.60.Bs Mechanical and acoustical properties
68.65.Ac Multilayers
68.60.Bs Mechanical and acoustical properties
68.65.Ac Multilayers
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
S. I. Burkov$^1$, O. P. Zolotova$^2$, P. P. Turchin$^1$, I. M. Rychkov$^1$
$^1$Institute of Engineering Physics and Radio Electronics, Siberian State University\
$^2$Institute of Space Research and High Technologies, Reshetnev Siberian State University of Science and Technology
$^1$Institute of Engineering Physics and Radio Electronics, Siberian State University\
$^2$Institute of Space Research and High Technologies, Reshetnev Siberian State University of Science and Technology