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Influence of the reactive atmosphere during magnetron sputtering on evolution of the phase composition of diamond-like coatings doped with chromium

I. S. Levin$^{1,2}$, V. M. Avdyukhina$^1$, M. M. Khrushchov$^2$, V. A. Schergunov$^2$

Memoirs of the Faculty of Physics 2017. N 4.

  • Article
Annotation

In the work, samples of diamond-like carbon coatings doped with chromium, obtained with the help of magnetron sputtering technology in active gas media, were investigated. The influence of the features of coating deposition (first of all, the composition of the sputtering atmosphere) on their phase composition and the fine atomic structure was studied. X-ray diffractometry was used as the main research method.

Received: 2017 June 14
Approved: 2017 July 25
PACS:
61.10.Nz X-ray diffraction
68.55.Nq Composition and phase identification
81.05.uj Diamond/nanocarbon composites
Authors
I. S. Levin$^{1,2}$, V. M. Avdyukhina$^1$, M. M. Khrushchov$^2$, V. A. Schergunov$^2$
$^1$Department of Solid State Physics, Faculty of physics, Lomonosov Moscow State University, chair of Condensed Matter Physics.\
$^2$Blagonravov Mechanical Engineering Research Institute of RAS
Issue 4, 2017

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