The angular dependences of the surface morphology, composition of the surface layer, and sputtering yield of indium phosphide during sputtering by a focused beam of gallium ions with an energy of 30 keV are experimentally obtained. Analysis of the surface was carried out using scanning electron microscopy and secondary ion mass spectrometry. Sputtering yields were determined by measuring the volume of sputtered craters. The experimental results are compared with mathematical simulating data in the TRIDYN. The influence of the choice of surface binding energy matrix on the simulation results is discussed.
$^1$P.G. Demidov Yaroslavl State University
Science News of the Faculty of Physics, Lomonosov Moscow State University
This new information publication, which is intended to convey to the staff, students and graduate students, faculty colleagues and partners of the main achievements of scientists and scientific information on the events in the life of university physicists.